Selective oxidation of the surface layer of bilayer WSe2 by laser heating

Hiroki Shioya¹, Kazuhito Tsukagoshi², Keiji Ueno³ and Akira Oiwa^4,5,6

Japanese Journal of Applied Physics58, 120903 (2019)

¹ Institute for Nanoscience and Design, Osaka University, Osaka 560-8531, Japan

² International Center for Materials Nanoarchitechtonics (WPI-MANA), National Institute for Materials Science (NIMS), Tsukuba, Ibaraki 305-0044, Japan

³ Department of Chemistry, Graduate School of Science and Engineering, Saitama University, Saitama 338-8570, Japan

⁴ The Institute Scientific and Industrial Research, Osaka University, Osaka 567-0047, Japan

⁵ Center for Spintronics Research Network (CSRN), Graduate School of Engineering Science, Osaka University, Osaka 560-8531, Japan

⁶ Quantum Information and Quantum Biology Division, Institute for Open and Transdisciplinary Research Initiatives, Osaka University, Osaka 560-8531 Japan